Journal of Microelectromechanical Systems
Journal of Microelectromechanical Systems > 2011 > 20 > 1 > 288 - 296
Journal of Microelectromechanical Systems > 2011 > 20 > 1 > 42 - 52
Journal of Microelectromechanical Systems > 2011 > 20 > 1 > 53 - 58
Journal of Microelectromechanical Systems > 2011 > 20 > 1 > 83 - 94
Journal of Microelectromechanical Systems > 2011 > 20 > 1 > 297 - 301
Journal of Microelectromechanical Systems > 2011 > 20 > 1 > 59 - 64
Journal of Microelectromechanical Systems > 2011 > 20 > 1 > 65 - 72
Journal of Microelectromechanical Systems > 2011 > 20 > 1 > 3 - 5
Journal of Microelectromechanical Systems > 2011 > 20 > 1 > 95 - 103
Journal of Microelectromechanical Systems > 2011 > 20 > 1 > 9 - 11
Journal of Microelectromechanical Systems > 2011 > 20 > 1 > 204 - 212
Journal of Microelectromechanical Systems > 2011 > 20 > 1 > 37 - 41
Journal of Microelectromechanical Systems > 2011 > 20 > 1 > 104 - 118
Journal of Microelectromechanical Systems > 2011 > 20 > 1 > 231 - 238
Journal of Microelectromechanical Systems > 2011 > 20 > 1 > 312 - 325
Journal of Microelectromechanical Systems > 2011 > 20 > 1 > 326 - 338
Journal of Microelectromechanical Systems > 2011 > 20 > 1 > 165 - 177